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N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor −28, were deposited on rugged and flexible polyimide foils by Hot-wire chemical vapor deposition using a tantalum filament heated to 1750°C. The piezoresistive response under cyclic quasi-static and dynamical (up to 100Hz) load conditions is reported. Test structures, consisting of microresistors having lateral...
This paper describes the manufacture of a thin skin-like piezoresistor strain-sensing membrane and the miniaturization of dense piezoresistive sensor arrays based on n-type hydrogenated nanocrystalline silicon thin-films (nc-Si:H) deposited on flexible polyimide substrates (PI). The nc-Si:H thin-films, prepared by hot-wire chemical vapor deposition, have a piezoresistive gauge factor of −32.2.Six...
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