The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
AbstractIn this paper, a prototype of 2mm-diameter micro-cycloid gear system fabricated by the multi-exposure LIGA technique is presented. The gear system is composed of a casing and three vertically stacked disks and gears. Each part consists of three different levels. The first level, 40m high, was fabricated by UV-lithography, and the second as well as the third level, 195m and 250m high respectively,...
AbstractTo fabricate microstructures with heights between 10 and 100m and smallest structural dimensions of several micrometers optical lithography is widely used. In this case positive photoresists of the DQN-type together with contact printing have been used by various groups to produce templates for electroplating. A common feature of the resist processes described in the literature is a concave...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.