The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
PZT thin films were processed by sol gel method on Pt electrodes on Si/SiO2 wafer. Microstructure and orientation of PZT thin films depend on the quality of bottom Pt electrodes. The Pt electrodes were deposited by evaporation or RF-sputtering. Three multilayers were investigated: (Si/SiO2/Ti/Pt/Au/Pt), (Si/SiO2/Ti/Pt) and (Si/SiO2/Ta/Pt). Even though the Pt bottom electrodes were oriented along the...
One of the critical steps toward producing void-free and uniform bottom-up copper electroplating in high aspect-ratio (AR) through-silicon vias (TSVs) is the ability of the copper electrolyte to spontaneously flow through the entire depth of the via. This can be accomplished by reducing the concentration gradient of cupric ions from the via mouth to the via bottom by enhancing the wettability of the...
MEMS electron-transparent membranes made of low-stress silicon nitride are widely employed in electron microscopy. However, this material has limited resistance to electron beams. We therefore developed a layer of LPCVD SiC. Our layer is amorphous, uniform, continuous, low-stress, and has extremely low etch-rates in common wet etchants. As free-standing electron transparent window, it demonstrates...
This paper presents a new concept of nano particle filtration module for lab-on-a-chip devices. This module is a perforated wall structure placed between two lateral fluid channels. Nanometer wide slots embedded in the wall connect both channels and allow only nano particles to flow through. By changing fabrication parameters, those highly uniformed nano slots can be adjusted from <100 nm to 2...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.