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The first sub-100nm technology that allows the monolithic integration of optical modulators and germanium photodetectors as features into a current 90nm base highperformance logic technology node is demonstrated. The resulting 90nm CMOS-integrated Nano-Photonics technology node is optimized for analog functionality to yield power-efficient single-die multichannel wavelength-mulitplexed 25Gbps transceivers.
A flat-top of 50-GHz Mux/Demux of DWDM exhibits a characteristic of 2.25×10−5 dB, an improvement of 2-order than previous study. The channel isolation reaches a high performance of 52.89dB, which is better than the previous study 16.51dB. The dispersion has a more than 50% enhancement compared to the previous investigations.
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