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In the present work, multifunctional Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D=2×1017ions/cm2 and energy E=60keV. The results demonstrated that ion implantation has an effect on the grain size, hardness,...
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