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Chemical shifts in Auger electron spectra versus Ar+ ion sputtering time were analysed for various passivated interfaces, including SiO2(100 nm)/Si, SiO2(40 nm)/4H-SiC structures and native oxide/austenitic stainless steel 316LVM. On this basis, in-depth profiles of chemical composition were determined and the thickness of passivation nanofilms was estimated. Quantitative numerical analysis was performed...
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