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The authors demonstrate a detection system of EUV radiation pulses. The system provides energy measurements with uncertainty of 7.3% in the range of wavelengths 13.5 ą 0.5 nm (FWHM = 7.3%). The calibration of the system was taken using the E-Mon commercial meter and a laser-plasma source. The procedures made it possible to determine a calibration factor for the laser-plasma source with helium-xenon...
The paper presents a laboratory setup with a procedure used for measurements of detector responsivity. The responsivity is specified in the range of extreme ultraviolet radiation (wavelength of 13.5 nm). This spectrum range is an important factor determining the next step of nanolithography. The main issue of this technology is an absolute measurement of radiation energy. The constructed laser-plasma...
W pracy omówiono system detekcji promieniowania skrajnego nadfioletu. Umożliwia on pomiar energii impulsów promieniowania w zakresie długości fal (13,5 š 0,5) nm. Przeprowadzone analizy i badania miały na celu określenie możliwości odniesienia wyników uzyskanych w tym zakresie długości fal do pasma (13,5 š 0,13) nm. W pracy zaprezentowano wyniki pomiaru widma promieniowania emitowanego ze źródła laserowo-plazmowego...
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