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The investigation samples of amorphous/microcrystalline silicon and silicon-germanium cells were made at low and high pressure as well as in graded H2, SiH4, GeH4 flows and various plasma power conditions by RF PECVD on a glass and also on a foil and were analyzed in four terminal configuration. The authors focused on fabrication of protocrystalline and microcrystalline Si and SiGe solar cells with...
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