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In this paper, we present the results of studies determining the optimum thickness of amorphous tetrahedral carbon (ta-C) thin films for industrial applications. ta-C coatings from 50 to 1000nm thickness were synthesized by a pulsed vacuum-arc method using a water-cooled electromagnetic Venetian blind plasma filter. Systematic studies of the thickness dependence of the microstructure and mechanical...
The paper presents the research results on the formation of amorphous ta-C films with a minimum amount of defects, deposited by pulsed vacuum-arc method with the use of a water-cooled electromagnetic Venetian blind plasma filter. The subject of the research was the influence of the substrate bias voltage, in the range of −25 to −200V, on the structural and mechanical properties of ta-C coatings. Dependence...
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