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Zinc oxide (ZnO) films were used in silicon-based photovoltaic (PV) structures both as an n-type partner to p-type Si and (on top) as a transparent electrode (as a so-called TCO film). Photovoltaic response of such PV structures depends on the electrical properties of n-ZnO films as well as p-Si (100) substrates. The ZnO-based TCO films were deposited by an Atomic Layer Deposition (ALD) method. The...
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