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Emission characteristics of low-pressure, i.e. less than 6.65 kPa, xenon inductively coupled plasma (ICP) was investigated. The discharge tube was made of Pyrex glass with outer diameter of 30 mm. A 4-turns coil was wound on the tube and RF power up to 100 W with frequency of 13.56 MHz was input to initiate a discharge. The luminance of the xenon discharge drastically changed depending on the pressure...
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