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This report experimentally demonstrated the fabrication and optimization of 45?? micro-mirror forming process in the polymer waveguide layer for optical interconections. The fluorinated acrylate waveguide is consisted of stacking of the lower cladding, core and upper cladding layer. The guide core (70 um ?? 70 um) is fabricated by the soft molding method and the cladding layers are fabricated by spin-coating...
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