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This paper presents a comprehensive study of the applicability of single-walled carbon nanotubes (SWCNTs) as interconnects in nanoscale integrated circuits. A detailed analysis of SWCNT interconnect resistance (considering its dependence on all physical parameters, as well as factors affecting the contact resistance), the first full 3-D capacitance simulations of SWCNT bundles for realistic very large...
Characterization and modeling of high current conduction in TiSi/sub 2/ and CoSi/sub 2/ films formed on n/sup +/-Si and n/sup +/ poly-Si under DC and pulsed stress conditions is reported for the first time. High current conductance of silicides is shown to be strongly affected by the technology and process conditions. The nonlinear I-V characteristics of silicide films under DC and pulsed high current...
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