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A new gas jet type Z-pinch source of 13.5 nm radiation, which has the characteristics of a gas jet electrodes configuration and the scheme for radial extraction of extreme ultraviolet (EUV) light, has been developed. The gas jet type Z-pinch discharge has two nozzles and two diffusers. The EUV beam is collected from the side of pinch plasma, generated in between the inner nozzle and corresponding...
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