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A detailed study is presented on the influence of Mn-doping on densities of screw (c-type) and edge (a-type) threading dislocations (TDs) in Ga 1−x Mn x N grown by metal organic chemical vapor deposition (MOCVD) by using high-resolution X-ray diffraction (XRD). Three regions were present in Mn source rate dependence plots of density of c-TDs, and the mean twist angle corresponding...
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