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Alcohol treatment may make it difficult to get clean Si surfaces terminated by hydrogen in the fabrication of semiconductor devices because alcohol remains as carbon contamination on a Si surface. To prevent this problem, the replacement of alcohol adsorbents on a Si surface with hydrogen by exposure to B 2 H 6 gas is proposed. This process must be carried out at temperatures below...
Alcohol treatment may make it difficult to get clean Si surfaces terminated by hydrogen in the fabrication of semiconductor devices because alcohol remains as carbon contamination on a Si surface. To prevent this problem, the replacement of alcohol adsorbents on a Si surface with hydrogen by exposure to B 2 H 6 gas is proposed. This process must be carried out at temperatures below...
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