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Nb5N6 bolometer is a high sensitive terahertz detector at room temperature. The core part of traditional Nb5N6 bolometer is microbridge with a typical size of 3 μm × 12 μm. We have recently proposed a method using electron beam lithography (EBL) instead of UV lithography on fabrication of Nb5N6 micro bridge, which will reduce the size of the micro-bridge one to two orders of magnitude, the minimum...
We design a T-shape structure reflecting mirror covered a gold thin film on the high-resistivity silicon substrate (ρ=1000 Ω·Cm) for the detector array. The electric field distribution of the T-shape structure is simulated by using finite difference time domain (FDTD) solutions in the frequency range from 300 GHz to 400 GHz. The electric field can be gathered in the central area of the silicon substrate...
We present an antenna-coupled 1 × 64 Nb5N6 microbolometer array detectors for real-time terahertz (THz) imaging. The intrinsic average responsivity of the detectors in the array is 650 V/W, and the corresponding noise equivalent power (NEP) is 17 pW/√Hz. The array chip is combined with a low noise readout circuit with 64 channels. The array detector was preliminary used for THz source imaging, and...
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