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We have directly crystallized Nd-Fe-B magnetic thin films onto heated substrates by rf sputtering. The crystallographic texture, microstructure and phase composition of the films were investigated by XRD, SEM and TEM, and the magnetic properties were measured using a VSM. The main phase of the films is the Nd 2 Fe 14 B phase, whose tetragonal c-axis is aligned perpendicular to...
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