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We present several efforts for arcing reduction during high aspect ratio etching. Strategies including pulsing etching adjustments, ex situ multi-cyclic etch approach, flush step incorporation, E-chuck voltage operation, cap material, etc. are explored. The details are discussed in the paper.
Leveraging large data sets, deep Convolutional Neural Networks (CNNs) achieve state-of-the-art recognition accuracy. Due to the substantial compute and memory operations, however, they require significant execution time. The massive parallel computing capability of GPUs make them as one of the ideal platforms to accelerate CNNs and a number of GPU-based CNN libraries have been developed. While existing...
K-d tree is attracting an increasing interest in recent decades for raytracing[1] due to its advantages in generating detailed images based on natural physical behaviors, flexibility, and ease of coding. However, the processing and rendering of real image have to be done in a real-time fashion. Such a requirement poses challenge to presentation and layout of global scenes because ray-scenes processing...
A novel compact planar antenna utilizing cascaded right/left-handed transmission lines is proposed. The significance of layout planning with respect to radiation is investigated and discussed in this paper. Two segments of transmission lines of the same electrical length with opposite signs are cascaded to provide zero phase at the operation frequency. The closed-form formulas for the equivalent circuit...
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