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A new Fabry-Perot (FP) microcavity structure with a novel, single and deeply corrugated diaphragm (SDCD) is presented for use as a pressure-sensing element. Both the zero-pressure offset due to the non-planar diaphragm structure and the signal averaging effect caused by the non-planar deflection of the diaphragm in response to an external pressure load are studied. The FP microcavity was fabricated...
A novel single deeply corrugated diaphragm (SDCD) is presented for high-sensitivity devices. Finite-element model is used to evaluate the mechanical sensitivity, resonance frequency and zero-pressure offset of the SDCD structure. Results show that very high performance of the diaphragm can be achieved using this technique. The optimized fabrication processes to obtain low tensile stress polysilicon...
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