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Lead-free barium tin titanate BaTi0.85Sn0.15O3 (BTS) ferroelectric thin films have been deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition. The structure and dielectric properties of thin films deposited at various oxygen pressures are investigated systematically. By optimizing the oxygen pressure during the deposition, the structure and dielectric properties are improved. The thin films...
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