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The interaction of the native oxide covered p-GaInP2(100) surface with aqueous 1M HCl and 40–48% (NH4)2S solutions is studied by high-resolution surface-sensitive photoemission spectroscopy excited by synchrotron radiation. The aqueous ammonium sulfide solution is more efficient in etching the native oxide layer than the aqueous HCl solution. After etching with any of the solutions, the gallium phosphates...
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