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Understanding the structural and functional integrity of self-assembled monolayers (SAMs) of alkytrichlorosilane on Si/SiO 2 interface with change in temperature is critical for realizing their utility as antistiction coatings during the fabrication and functioning of microelectromechanical systems. Here we describe the thermal stability of two dimensional (2D) octadecyltrichlorosilane (OTS)...
We have studied the growth kinetics and thermodynamic stability of octadecyltrichlorosilane (OTS) self-assembled monolayers on Si (100) substrate in order to understand its role in controlling the adhesion and surface hydrophobicity. Time-dependent contact angle measurements, using water as a function of OTS concentration, show rapid monolayer formation in the initial stage followed by a slow attainment...
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