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Fabrication of FeSi 2 nano- and microdot array was performed by utilizing droplet ejection through laser-induced forward transfer, which we named laser-induced dot transfer (LIDT). An amorphous FeSi 2 alloy source film on a transparent support was illuminated from the support by a nanosecond excimer laser pulse patterned into migcrogrid form, resulting in size- and site-controlled...
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