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We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.
We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.
Laser cutting of carbon fiber reinforced plastics (CFRP) with a cw IR fiber laser (λ= 1090 nm, average power: 1kW). A well-defined cutting of CFRP which was free of debris and thermal-damages around the grooves, was performed by the laser irradiation with a fast beam galvanometer scanning on a multiple-scan-pass method.
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