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Most of the microelectromechanical systems inertial switches developed in recent years are intended for shock and impact sensing above 40 g. These switches are fabricated based on non-silicon surface micromachining with multiple steps of electroplating. In this reported work, a silicon-based low-g inertial switch typically used for linear acceleration sensing was conceived, designed and fabricated...
A tri-axial all-metal inertial microswitch with compliant stationary electrodes for prolonging the contact time is proposed and fabricated. A half-moon-shaped cantilever structure is designed and utilised as the compliant stationary electrode in the + x- and + y-directions. It can sufficiently deform and realise a flexible contact in horizontal directions. Similarly, the designed multi-hole crossbeam...
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