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The Young's modulus (E) of Si substrate begins to noticeably decrease below 50-μm thickness. The Young's modulus in 30-μm thick Si substrate decreased by approximately 30% compared to the modulus of 50-μm thickness. In 30-μm thick Si substrate, the lattice structure of Si substrate is highly distorted. Large distortion of the lattice structure induces the Young's modulus reduction, consequently weakens...
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