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Lead zinc niobate -lead zirconate titanate (PZN-PZT) thick films with thickness of ~50 μm were deposited on silicon and alumina substrates using aerosol deposition method (ADM). The effects of excess lead oxide (PbO) on stress relaxation during post-annealing were studied. Excess PbO content was varied from 0 to 5 mol%. The as-deposited film had fairly dense microstructure with nano-sized grains....
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