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The market share of thin semiconductors has continuously increased in microelectronical, micromechanical as well as in the solar industries in the recent years, e.g. due to required flexibility for RFIDs or cost reduction of solar cells. However thin wafers are difficult to handle, because of the increasing flexibility and increasing sensitivity to mechanical, thermal and intrinsic loads in manufacturing...
Drop testing of micromachined accelerometers from the height of a table top to a solid surface shows that a moderate impact can result in severe damage of transducer elements. The relative high stiffness of the accelerometer device in combination with a high contact stiffness of the solid surface cause extremely high acceleration pulses at the impact. This paper presents a detailed analysis of the...
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