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This paper describes the optimisation of top-down fabrication process of the ZnO-based dual nanowire field effect transistors (NWFETs) based on the spacer method. The approach uses the top-down nanowire process with reduced sidewall roughness during pattern transfer to improve the electrical characteristics. The main feature of the process involves a reflow of the photoresist performed at a temperature...
Top-down method was used to fabricate zinc oxide (ZnO) nano wire field effect transistor (NWFET) biosensor. The nanosensor was used to measure the electrical characteristics of lysozyme (LYSO) and bovine serum albumin (BSA) protein solutions in phosphate buffered saline (PBS). The LYSO and BSA proteins are oppositely charged at measurement pH of 7.4. Subthreshold voltage shift of 340 mV and 700 mV...
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