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A micromachined thermal emitter for fast transient temperature operation with a novel hot-plate concept is presented. This concept is based on a nonaxis-symmetric design with excellent mechanical properties during temperature modulation combined with high thermal decoupling. Especially, the mechanical stress induced by the thermal expansion of the hot-plate and their suspension was improved. This...
A novel micromachined thermal emitter for fast transient temperature operation is presented. Most commercial available thermal emitters are not able to operate in a pulsed mode. The spider type hotplate concept promises an excellent mechanical stability together with high thermal decoupling. The thermal emitter is fabricated using silicon on insulator (SOI) technology and KOH-etching. The emitter...
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