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We developed a model for the motional impedance Zm of electrostatic resonators that operate in a nonlinear regime. The model predicts that the Zm at resonance has the same expression as it has in the linear case. In addition, we developed a new measurement setup, which is based on a variable-phase feedback circuit. This setup enables the measurement of Zm at operating points that are unobservable...
An ultra-sensitive, encapsulated, resonating strain gauge first presented in Transducers'09 was calibrated and used to study stress relaxation of sputtered 99.95% Platinum (Pt) thin films at temperatures of less than 100??C. Because of the extreme long-term stability of these encapsulated crystalline resonators and the ability to observe frequency changes at or below 1 ppm, this device offers a unique...
In this work, we develop a theoretical explanation for the temperature dependence of the nonlinear amplitude-frequency (A-f) effect in micromechanical resonators. Using this theory, we explain the discrepancy in frequency-temperature (f-T) characteristics between open-loop observation and closed-loop measurements. We show how the temperature dependence of the A-f effect introduces bias voltage dependence...
We present a hermetically encapsulated breathe-mode ring resonator with very high quality factor (~473,000) and frequency at 10.65 MHz and 13.29 MHz. The resonator's nonlinear behavior is experimentally characterized and theoretically analyzed for the first time. The maximum current handling is measured and verified using two different methods. We find that material nonlinearity (nonlinear Young's...
We report on the first study of fatigue in single crystal silicon MEMS resonators within an extremely clean and controlled environment using the `epi-seal' encapsulation technology. This packaging technology provides a unique opportunity to investigate controversial issues in silicon fatigue since the devices are not exposed to air, oxygen, organics, or other residues that might complicate the initiation...
We develop an efficient characterization method for temperature compensated micromechanical resonators by employing empirical data analysis with an a priori model. We have previously demonstrated that electrostatic-tuning of a composite resonator with an accurate lookup table can achieve a temperature stability of ??3.2 ppm, but this characterization method was not suitable for commercialization since...
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