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Herein we have investigated the domain width distributions of block copolymers and their ternary blends after directed assembly on chemically patterned surfaces with and without density multiplication. On chemical patterns with density multiplication, the width of the interpolated block copolymer domains was bimodal. Once blended with the corresponding homopolymers, the block copolymers exhibited...
Fabrication of chemical patterns by electron beam lithography or extreme ultraviolet interference lithography is either low-throughput or prohibitively expensive to practice at sub-50 nm feature dimension. Here we report a new high-throughput approach that combines the advantages of both graphoepitaxy and molecular transfer printing (MTP) to fabricating chemical patterns at low cost for directed assembly...
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