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This paper proposed a low-profile terahertz (THz) horn antenna with double-layer corrugated V groove for gain enhancement based on Si-based MEMS technology. The proposed antenna possess bandwidth for VSWR below 1.6 from 275GHz to 750GHz. The double-layer corrugated V groove can be effectively used to improve the gain and side-lobe of antenna from calculation and optimization by using three-dimension...
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