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In this paper, a microelectromechanical systems fishbone-shaped electrostatic double-ended tuning fork (DETF) resonator with selectable higher modes is presented. The resonator can realize ten vibration modes with resonant frequencies from 137.929 to 913.476 kHz and multi-mode selection function. Different from conventional electrostatic actuation methods, the proposed fishbone-shaped structure combined...
This paper reports an improved-sensitivity resonant accelerometer with fishbone-shaped resonators of higher vibration modes. Different from conventional resonant accelerometer integrating with low-order vibrating resonators, our prototype utilizes higher-mode fishbone-shaped resonators based on the principle that higher vibration modes have a higher frequency sensitivity. The proposed fishbone-shaped...
In this study, a resonant frequency tunable silicon fishbone-shaped MEMS (micro-electro-mechanical systems) double-ended tuning fork is presented, which realizes digitally tunable resonant frequency function. Different from conventional electrostatic actuation methods, this fishbone-shaped DETF integrates six pairs of short beams on two main beams. The moment generated by the short beam causes the...
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