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Summary form given only. ZnO possesses superior semiconductor properties and chemical stability and thus has attracted much attention for potential applications in piezoelectric and optoelectronic devices. With the trend toward nanoscale object fabrication for better carrier confinement, research on ZnO quantum dots becomes more active. Up to now, high quality ZnO quantum dots have only been demonstrated...
In this paper we present a novel method of nano-imprinting which adopts important features of conventional nano-imprinting lithography (NIL) and the newly developed laser-assisted direct imprinting (LADI) method. It utilizes an Nd-YAG pulsed laser of wavelength 1064 nm which can easily penetrate and also heat up a silicon mold which is pressed against a resist layer deposited on a substrate. The fast...
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