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A few millimeter size plasma was generated in a pin to plane electrode configuration with either Aluminum or Indium Tin Oxide glass. Depending on the plane electrode material, the plasma showed either corona or corona-dielectric barrier discharge hybrid discharge characteristics. From electrical and optical diagnostics, it was found that the hybrid discharge was more electrically stable and had lower...
Oxygen and helium gases, often used in many plasma processes, were added to argon-based glow plasmas, produced at the atmospheric pressure, in order to study the controllability of the plasma characteristics by the supply gas mixing. Based on the electrical and optical diagnostics, the plasma parameters, such as the breakdown voltage, the rotational temperature, and the plasma uniformity, and their...
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