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We study and compare the pressure sensitivities of different area Rayleigh Lamb wave (RL) mode (S1 mode) and FBAR resonators. The studied RL-mode and FBAR resonators operate at 785MHz and 628MHz respectively. The resonators are fabricated on a released membrane with AlN as the piezoelectric layer. The resonators are hermetically sealed and the manufacturing process uses standard micromachining techniques...
In this paper we give experimental observations of the complex valued Lamb mode in a FBAR resonator, using the AIM [1] and standard S-parameter measurements. Furthermore, a theoretical explanation of the observed behavior, based on the Berlincourt formula for the effective coupling coefficient, is offered. This explanation proposes a laterally “self-confined” mode that arises through the mechanical...
Acoustical attenuation and velocity parameters for Carbon Doped Oxide (CDO) thin films at GHz frequencies are needed to design Coupled Resonator Filters (CRF). CDO exhibits longitudinal acoustical impedance in the range of 2 to 11 MRayls, velocity of 2400 to 4000 m/s, and acoustical attenuation of 300 to 5000 dB/cm @ 1 GHz. A novel short loop acoustical technique is presented to make these measurements...
Background: It is desired to grow AlN in a reversed c-axis configuration to fabricate R-FBARS (Reversed c-axis Film Bulk Acoustic Resonator) with reactively sputtered, thin film Aluminum Nitride (AlN). Previous methods of growing reversed c-axis AlN, result in films with low electro-acoustic coupling constant, low Q, or inability to withstand the Avago Technologies FBAR release process. Conribution/Methods:...
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