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Role of ex-situ oxygen plasma (OP) treatment on mechanical properties of diamond-like carbon (DLC) thin films is explored. The DLC film after this treatment shows superhardness behaviour, maximum hardness of 46.3GPa and elastic modulus of 423.2GPa are obtained when film grown at self bias of 100V followed by 10min OP treatment. Moreover, the colour of the coating is fed after OP treatment, leading...
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