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Electroosmotic flow (EOF) micropumps which use electroosmosis to transport liquids have been fabricated and used to achieve pressures in excess of 20atm and flow rates of 3.6μl/min for 2kV applied potentials. These pumps use deionized water as working fluids in order to reduce the ion current of the pump during operation and increase thermodynamic efficiency. EOF pumps are fabricated by packing the...
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