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This review gives a brief introduction to materials and techniques used for microfabrication. Rigid materials have typically been used to fabricate microstructures and systems. Elastomeric materials are becoming attractive, and may have advantages for certain types of applications. Photolithography is the most commonly used technique for the fabrication of structures for microelectronic circuits,...
“Nanostructured materials” are those having properties defined by features smaller than 100 nm. This class of materials is interesting for the reasons: i) They include most materials, since a broad range of properties—from fracture strength to electrical conductivity—depend on nanometer-scale features. ii) They may offer new properties: The conductivity and stiffness of buckytubes, and the broad range...
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