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The erosion of W coatings with the different content of C was investigated in Ar and Ar+H 2 plasmas. The enhanced erosion was registered in Ar+H 2 plasma for coatings containing 40at.% of C and more, which might be owing to chemical erosion of carbon. The erosion kinetics was analyzed together with the studies of coatings microstructure, phase composition and Vicker hardness properties...
The erosion kinetics under irradiation by Ar ions extracted from plasma by 300V negative bias voltage of 2μm-thick W film contaminated by redeposited carbon atoms was investigated in dependence on the Ar-working gas pressure in the range 0.2–10Pa at 410K. The erosion and deposition parameters were deduced from the dependence of the sample's weight change on irradiation time. Two regimes were distinguished...
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