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In this paper, we present the development of the waveguide niobium titanium nitride (NbTiN) superconducting hot electron bolometer (HEB) mixers, cryogenically cooled by a 4 K close-cycled refrigerator. The NbTiN thin film is formed on a crystalline quartz substrate by sputtering an NbTi target with the Ar and N2 gas at room temperature. The HEB mixer element is fabricated by using the 12 nm NbTiN...
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