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Undoped and 0.56 at.% Sb‐doped ZnO thin films were prepared by pulsed laser deposition (PLD) under vacuum and an oxygen pressure of 0.2 Pa with sintered ceramic as targets. The effects of Sb doping and deposition atmosphere on structure and optical–electrical properties of the films were studied by X‐ray diffraction (XRD), scanning probe microscopy (SPM), Hall Effect measurement, transmittance spectra,...
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