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By leveraging on the wealth of Si-CMOS technology know-how and the largely available infrastructures, the fundamental photonic device building blocks and circuit integration platform, essential for the realization of the electronic-photonic integrated circuit (EPIC), have been successfully developed. This presentation gives an overview on the current status of this critical technology and provides...
Focused Ion Beam (FIB) milling has been widely used for the preparation of TEM specimens in both cross-section and plan view configurations. FIB induced damage is a non-negligible influence on making a thin and clear TEM specimen. Low-KV FIB is one of the solutions to reduce the ion beam damage created in current FIB operation system. An understanding of the type of FIB generated artifact on different...
This paper reports a novel silicon platform with integrated MEMS actuators, which is used for fine-positioning and locking of a ball-lens, to address the optical coupling issues in silicon photonics packaging. The fine-positioning and locking function of the ball-lens have been successfully demonstrated by the developed prototype silicon platform. The main adjusting actuator delivered a large force...
A silicon waveguide based splitter is a key device for polarization diversity circuit. A bilayer waveguide structure was proposed by MIT to split the input light into its orthogonal components. It is challenging to fabricate a bilayer silicon waveguide by the conventional two-step-etching process due to precise alignment and accurate etch thickness required. In addition, the partial etched waveguide...
This paper investigates the additional iron loss generated in the laminated silicon sheets of the core or the magnetic shields of large power transformers due to the leakage flux. A verification model is well established, and an efficient analysis method is implemented and validated. Both the magnetic and electric anisotropy of the oriented silicon steel sheets are taken into account in 3-D FEM eddy...
A microwave re-entrant cavity is applied to create a miniature beam of plasma species. A miniature microwave plasma discharge is created using 2.45 GHz microwave energy to generate a discharge inside 1-2 mm inner diameter (i.d.) tubes with a micromachined aperture on the end. Through this aperture the plasma stream for materials processing is formed. The diameter of the plasma stream considered in...
We report the first detailed characterization, to the best of our knowledge, of wavelength dependence of two-photon absorption and the Kerr nonlinearity in silicon over a spectral range extending from 1.2 to 2.4 mum.
Summary form only given. Miniature discharges and their potential use for local area materials processing including etching, surface activation, and plasma-assisted CVD are investigated in this study. The objective of this study is to do materials etching steps on localized areas by applying a small discharge to only the region being processed. A miniature microwave plasma discharge applicator design...
Summary form only given. Miniature discharges and their potential use for local area materials processing are investigated in this study. The objective of this study is to do materials processing steps including etching, surface activation, and plasma-assisted CVD on localized areas by applying a small discharge to only the region being processed. A miniature microwave plasma discharge applicator...
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