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We designed, fabricated, and experimentally demonstrated a dynamically balanced z-axis MEMS vibratory gyroscope utilizing the concentrated suspension architecture. This architecture allows for a high degree of structural symmetry (degeneracy of modes), potentially enabling high precision Rate Gyroscopes (RG) and Rate Integrating Gyroscopes (RIG). The full dynamic balance of the design is enabled by...
In this paper, a novel hollow micro-disk mass sensor based on mode generation and degeneration principle is presented, which has the advantages of self-compensating environmental fluctuation and eliminating viscous damping as vacuum packaged. The device configuration, including the width of support beams, the channel height and the allocation of the sensing piezoresistors are carefully analyzed and...
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