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This report shows the effect of Cp2Mg supply on MOVPE growth behavior of InN. At low growth temperature (∼600 °C), the formation of adducts occurred, which degenerates the crystal quality. With increasing the growth temperature, the adduct formation was suppressed because the decomposition of Cp2Mg was enhanced and thus the incorporation of carbon into the film was suppressed. The use of Cp2Mg during...
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