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A micro-acceleration latching switch with barb latching mechanism is presented in this paper. The latching mechanism which likes a “barb” can make the switch latch reliably. What's more, the flexible contacts can prevent the switch from opening due to impact resulting from the rebound or vibration of proof mass when the switch is latched. The stops which limit displacement will also improve the reliability...
The electrostatic negative-stiffness behavior of vertical structures under out-of-plane motion decreases the resonant frequency and deteriorates the linearity of a lateral-axis tuning-fork gyroscope (TFG). An electrostatically isolated silicon island is proposed to suppress this behavior. The negative-stiffness behavior is observed and the effectiveness of the electrostatic isolation is experimentally...
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