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DLC films ranging from 5 to 180 nm in thickness have been prepared by plasma-based ion implantation (PBII) with C on Si. The structures of the films were studied with XPS and Raman spectroscopy. The nanohardness and the intrinsic stress of the films were measured. Dry sliding wear experiments have been carried out, using a ball-on-disc tester, to investigate the tribological properties of DLC films...
Four carbon nanometer films ranging from 5 to 60nm have been prepared by plasma-based ion implantation (PBII) with C on Si (100) wafers. Raman spectra and X-ray photoelectron spectroscopy (XPS) indicate these films are diamond-like carbon (DLC) films with high sp 3 /sp 2 bonds ratio. Atomic force microscopy shows that their appearances are smooth and compact, and improved to some extent...
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