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To obtain highly transparent conductive F-doped SnO2 films by magnetron sputtering at low substrate temperatures, a new method of sputtering high-density SnF2–Sn target in Ar + O2 atmosphere was adopted in the present study. The structural, electrical, and optical properties of the films prepared were investigated as a function of O2 flux. The results indicate that the films shows SnO2 phase only...
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